半导体工艺与整合 (半导体制程与整合) Semiconductor Engineering
授课老师：台湾清华大学 工程与系统科学系 吴永俊老师
此课程从2D MOSFET制程教到FinFET, GAAFET至N1节点
课程参考用书：
1. Neamen, Donald A. Semiconductor Physics and Devices: Basic Principles (4th Edition). McGraw-Hill, 2012.
2. Sze, Simon M., and Lee, Ming-Kwei. Semiconductor Devices: Physics and Technology (3rd Edition). Wiley, 2012.
3. Hu, C. C. Modern Semiconductor Devices for Integrated Circuits. Pearson Prentice Hall, 2010.
4. Streetman, B. G., and S. Banerjee. Solid State Electronic Devices (6th Edition). Pearson Prentice Hall, 2006.
5. Xiao, Hong. Introduction to Semiconductor Manufacturing Technology (2nd Edition). SPICE, 2012.
6. Plummer, James D., Deal, Michael, Griffin, Peter D. VLSI Technology: Fundamentals, Practice, and Modeling. Prentice Hall, 2000.
7. TCAD Sentaurus Device. Synopsys, Inc., 2016.
8. 刘传玺, 陈进来. 半导体元件物理与制程：理论与实务 (3版). 五南图书, 2011.
9. http://www.srim.org/
10. 相关国际SCI期刊与会议IEEE国际会议 IEDM VLSI
